TY  - CONF
AU  - Tarrio, Charles
AU  - Lucatorto, Thomas
AU  - Grantham, S
AU  - Squires, M
AU  - Arp, Uwe
AU  - Deng, Lu
C2  - Soft X-Ray and UV Imaging II , San Diego, CA
DA  - 2001-01-01
LA  - en
M1  - 4506
PB  - Soft X-Ray and UV Imaging II , San Diego, CA
PY  - 2001
TI  - Improvements to the NIST/DARPA EUV Reflectometry Facility
ER  -