TY  - JOUR
AU  - Coakley, Kevin
AU  - Chen-Mayer, Huaiyu
AU  - Lamaze, George
AU  - Simons, David
AU  - Thompson, P
C2  - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms
DA  - 2002-06-01
LA  - en
M1  - 192
PB  - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms
PY  - 2002
TI  - Calibration of a Stopping Power Model for Silicon Based on Analysis of Neutron Depth Profiling and Secondary Ion Mass Spectrometry Measurements
ER  -