TY  - CONF
AU  - am, B
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Headley, T
AU  - Guthrie, William
AU  - Linholm, Loren
AU  - Bogardus, H
AU  - Murabito, Christine
C2  - Proceedings of the IEEE International Conference on Microelectronic Test Structures, Cork, UK
DA  - 2002-04-01
LA  - en
M1  - 15
PB  - Proceedings of the IEEE International Conference on Microelectronic Test Structures, Cork, UK
PY  - 2002
TI  - Measurement of the Linewidth of Electrical Test-Structure Reference Features by Automated Phase-Contrast Image Analysis
ER  -