TY  - JOUR
AU  - Sandberg, Martin
AU  - Kline, Jeffrey
AU  - Weides, Martin
AU  - Wisbey, David
AU  - Pappas, David
C2  - Applied Physics Letters
DA  - 2012-06-25
DO  - https://doi.org/10.1063/1.4729623
LA  - en
M1  - 100
PB  - Applied Physics Letters
PY  - 2012
TI  - Etch induced microwave losses in titanium nitride superconducting resonators
ER  -