TY  - JOUR
AU  - Bertness, Kristine
AU  - Wang, C
AU  - Salit, Marc
AU  - Turk, Gregory
AU  - Butler, Therese
AU  - Paul, Albert
AU  - Robins, Lawrence
C2  - Journal of Vacuum Science and Technology B
DA  - 2006-09-01
LA  - en
M1  - 24
PB  - Journal of Vacuum Science and Technology B
PY  - 2006
TI  - High-accuracy epitaxial A1GaAs composition determination with inductivity coupled plasma optical emission spectroscopy
ER  -