TY - JOUR AU - Hurley, Donna AU - Tewary, Vinod AU - Richards, A C2 - Measurement Science & Technology DA - 2001-09-01 LA - en M1 - 12 PB - Measurement Science & Technology PY - 2001 TI - Surface Acoustic Wave Methods to Determine the Anisotropic Elastic Properties of Thin Films ER -