TY  - CONF
AU  - Stafford, Gery
AU  - Moffat, Thomas
AU  - Jovic, V
AU  - Kelley, David
AU  - Bonevich, John
AU  - Josell, Daniel
AU  - Vaudin, Mark
AU  - Armstrong, N
AU  - Huber, W
AU  - Stanishevsky, A
C2  - Proceedings of the 2000 International Conference on Characterization and Metrology for ULSI Technology
DA  - 2001-01-01
LA  - en
M1  - 550
PB  - Proceedings of the 2000 International Conference on Characterization and Metrology for ULSI Technology
PY  - 2001
TI  - Cu Electrodeposition for On-Chip Interconnections
ER  -