TY - CONF AU - Hurley, Donna AU - Wiehn, J AU - Turner, J AU - Rice, Paul C2 - Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems | | Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems | SPIE DA - 2002-06-01 LA - en M1 - 4703 PB - Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems | | Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems | SPIE PY - 2002 TI - Quantitative Elastic-Property Information With Acoustic AFM: Measurements and Modeling ER -