TY  - JOUR
AU  - Jung, Yeon-Gil
AU  - Lawn, Brian
AU  - Martyniuk, M
AU  - Huang, H
AU  - Hu, X
C2  - Journal of Materials Research
DA  - 2004-10-01
LA  - en
M1  - 19
PB  - Journal of Materials Research
PY  - 2004
TI  - Evaluation of Elastic Modulus and Hardness of Thin Films By Nanoindentation
ER  -