TY  - CONF
AU  - Lee, Hae-Jeong
AU  - Vogt, B
AU  - Soles, Christopher
AU  - Liu, Da-Wei
AU  - Bauer, Barry
AU  - Wu, Wen-Li
AU  - Lin, Eric
AU  - Kang, Gwi-Gwon
AU  - Ko, Min-Jin
C2  - IEEE International Interconnect Technology Conference|7th| International Interconnect Technology|IEEE
DA  - 2004-06-01
LA  - en
PB  - IEEE International Interconnect Technology Conference|7th| International Interconnect Technology|IEEE
PY  - 2004
TI  - X-Ray and Neutron Porosimetry as Powerful Methodologies for Determining Structural Characteristics of Porous Low-k Thin Films
ER  -