TY  - CONF
AU  - Lee, Hae-Jeong
AU  - Soles, Christopher
AU  - Liu, Da-Wei
AU  - Bauer, Barry
AU  - Lin, Eric
AU  - Wu, Wen-Li
C2  - International Interconnect Technology Conference | 6th |
DA  - 2003-06-01
LA  - en
PB  - International Interconnect Technology Conference | 6th |
PY  - 2003
TI  - Structural Characterization of Methylsilsequioxane-Based Porous Low-k Thin Films Using X-Ray Porosimetry
ER  -