TY  - CONF
AU  - Hedden, R
AU  - Bauer, Barry
AU  - Lee, Hae-Jeong
C2  - Materials Research Society Symposia Proceedings | | Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectricx--2003: 2003 Mrs Spring Meeting | Materials Research Society
DA  - 2003-04-01
LA  - en
M1  - 766
PB  - Materials Research Society Symposia Proceedings | | Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectricx--2003: 2003 Mrs Spring Meeting | Materials Research Society
PY  - 2003
TI  - Characterization of Nanoporous Low-k Thin Films by Contrast Match SANS
ER  -