TY  - GEN
AU  - Soles, Christopher
AU  - Bauer, Barry
AU  - Wu, Wen-Li
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2003-03-01
LA  - en
M1  - 108 No. 2
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2003
TI  - X-Ray Porosimetry: A New Method for the Characterizaton of Porous Low-Dielectric-Constant Thin Films Adaptable for the Semiconductor Industry
ER  -