TY  - CONF
AU  - Jones, Ronald
AU  - Hu, T
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Casa, D
AU  - Barclay, G
C2  - Characterization and Metrology for ULSI Technology, International Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterizeion and Metrology for ULSI Technology | AIP
DA  - 2003-09-01
LA  - en
M1  - 683
PB  - Characterization and Metrology for ULSI Technology, International Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterizeion and Metrology for ULSI Technology | AIP
PY  - 2003
TI  - 3-Dimensional Lineshape Metrology Using Small Angle X-ray Scattering
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852165
ER  -