TY  - JOUR
AU  - Green, Martin
AU  - Chang, K
AU  - Takeuchi, Ichiro
AU  - Chikyow, T
C2  - ECS Transactions
DA  - 2006-09-01
LA  - en
M1  - 3
PB  - ECS Transactions
PY  - 2006
TI  - A Combinatorial Study of Metal Gate/HfO2 MOSCAPS
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854327
ER  -