TY  - JOUR
AU  - Green, Martin
AU  - Allen, Andrew
AU  - Li, Xiang
AU  - Wang, Junling
AU  - Ilavsky, J
AU  - Delabie, A
AU  - Puurunen, R
AU  - Brijs, B
C2  - Applied Physics Letters
DA  - 2006-01-16
LA  - en
M1  - 88
PB  - Applied Physics Letters
PY  - 2006
TI  - The Nucleation of Atomic Layer Deposited HfO2 Films, and Evolution of Their Microstruture, Studied by Grazing Incidence Small Angle X-ray Scattering Using Synchrotron Radiation
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854304
ER  -