TY  - CONF
AU  - Soles, Christopher
AU  - Jones, Ronald
AU  - Lenhart, Joseph~undefined~undefined~undefined~undefined~undefined
AU  - Prabhu, Vivek
AU  - Wu, Wen-Li
AU  - Lin, Eric
AU  - Goldfarb, D
AU  - Angelopoulos, M
C2  - Advanced Environmental and Chemical Sensing Technology, Coference | 20th | | SPIE
DA  - 2003-02-01
LA  - en
M1  - 5039
PB  - Advanced Environmental and Chemical Sensing Technology, Coference | 20th | | SPIE
PY  - 2003
TI  - Polymer Dynamics and Diffusive Properties in Ultra-Thin Photoresist Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852201
ER  -