TY  - CONF
AU  - Soles, Christopher
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Lin, Q
AU  - Angelopoulos, M
C2  - Proceedings of the 12th International Conference on Photopolymers,  Brookfield, CT
DA  - 2001-01-01
LA  - en
PB  - Proceedings of the 12th International Conference on Photopolymers,  Brookfield, CT
PY  - 2001
TI  - Confinement Induced Deviation in Ultra-thin Photoresist Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853792
ER  -