TY  - JOUR
AU  - Prabhu, Vivek
AU  - Sambasivan, S
AU  - Fischer, Daniel
AU  - Sundberg, Linda
AU  - Allen, Robert
C2  - Applied Surface Science
DA  - 2006-11-15
LA  - en
M1  - 253
PB  - Applied Surface Science
PY  - 2006
TI  - Quantitative depth profiling of photoacid generators in photoresist materials by near-edge x-ray absorption fine structure spectroscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854199
ER  -