TY  - CONF
AU  - Jones, Ronald
AU  - Soles, Christopher
AU  - Lin, Eric
AU  - Hu, Walter
AU  - Reano, R
AU  - Pang, Stella
AU  - Weigand, Steven
AU  - Keane, D
AU  - Quintana, John
C2  - Proceedings of the Spie 2005: Microlithography, San Jose, CA.
DA  - 2005-01-01
LA  - en
PB  - Proceedings of the Spie 2005: Microlithography, San Jose, CA.
PY  - 2005
TI  - Pattern Fidelity in Nanoimprinted Films Using Cd-Saxs
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853997
ER  -