TY  - JOUR
AU  - Hu, T
AU  - Jones, Ronald
AU  - Wu, Wen-Li
AU  - Lin, Eric
AU  - Lin, Q
AU  - Keane, D
AU  - Weigand, Steven
AU  - Quintana, J
C2  - Journal of Applied Physics
DA  - 2004-08-01
LA  - en
M1  - 96
PB  - Journal of Applied Physics
PY  - 2004
TI  - Small Angle X-Ray Scattering Metrology for Sidewall Angle and Cross Section of Nanometer Scale Line Gratings
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852323
ER  -