TY  - JOUR
AU  - Lee, Hae-Jeong
AU  - Hyun, 
AU  - Soles, Christopher
AU  - Jones, Ronald
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Hines, Daniel
C2  - Journal of Vacuum Science and Technology
DA  - 2005-12-01
LA  - en
M1  - 23(6)
PB  - Journal of Vacuum Science and Technology
PY  - 2005
TI  - Effect of Initial Resist Thickness on Residual Layer Thickness of Nanoimprinted Structures
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852524
ER  -