TY  - JOUR
AU  - Lin, Eric
AU  - Satija, Sushil
AU  - Wu, Wen-Li
AU  - Soles, Christopher
AU  - Goldfarb, D
AU  - Trinque, B
AU  - Burns, S
AU  - Jones, Ronald
AU  - Lenhart, Joseph~undefined~undefined~undefined~undefined~undefined
AU  - Angelopoulos, M
AU  - Willson, C
C2  - Science
DA  - 2002-07-01
LA  - en
M1  - 297
PB  - Science
PY  - 2002
TI  - Direct Measurement of the Reaction Front in Chemically Amplified Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852012
ER  -