TY  - CONF
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Lin, Q
AU  - Angelopoulos, M
C2  - Metrology, Inspection and Process Control for Microlithography, Conference | 15th | Metrology, Inspection and Process Control for Microlithography XV | SPIE
DA  - 2001-08-01
LA  - en
M1  - 4344
PB  - Metrology, Inspection and Process Control for Microlithography, Conference | 15th | Metrology, Inspection and Process Control for Microlithography XV | SPIE
PY  - 2001
TI  - Feature-Shape and Line-Edge Roughness Measurement of Deep Submicron Lithographic Structures Using Small-Angle Neutron Scattering
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851833
ER  -