TY  - JOUR
AU  - Soles, Christopher
AU  - Lin, Eric
AU  - Lenhart, Joseph~undefined~undefined~undefined~undefined~undefined
AU  - Jones, Ronald
AU  - Wu, Wen-Li
AU  - Goldfarb, D
AU  - Angelopoulos, M
C2  - Journal of Vacuum Science and Technology B
DA  - 2001-12-01
LA  - en
M1  - 19
PB  - Journal of Vacuum Science and Technology B
PY  - 2001
TI  - Thin Film Confinement Effects on the Thermal Properties of Model Photoresist Polymers
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851889
ER  -