TY  - JOUR
AU  - Wu, Wen-Li
AU  - Lin, Eric
AU  - Lin, Q
AU  - Angelopoulos, M
C2  - Journal of Applied Physics
DA  - 2000-12-01
LA  - en
M1  - 88
PB  - Journal of Applied Physics
PY  - 2000
TI  - Small-Angle Neutron Scattering Measurements of Nanoscale Lithographic Features
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851751
ER  -