TY  - CONF
AU  - Lin, Eric
AU  - Lee, V.
AU  - Bauer, Barry
AU  - Wang, Haonan
AU  - Wetzel, J
AU  - Wu, Wen-Li
C2  - Characterization and Metrology for ULSI Technology : 2000 International Conference,  Gaithersburg, MD
DA  - 2000-01-01
LA  - en
M1  - 47(6)
PB  - Characterization and Metrology for ULSI Technology : 2000 International Conference,  Gaithersburg, MD
PY  - 2000
TI  - Structure and Property Characterization of Low-k Dielectric Porous Thin Films Determined by X-ray Reflectivity and Small-Angle Neutron Scattering
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853662
ER  -