TY  - CONF
AU  - Sakai, W
AU  - Chiang, C.
C2  - Symposium Proceedings of Materials Research Society, Boston, MA
DA  - 2002-01-01
LA  - en
PB  - Symposium Proceedings of Materials Research Society, Boston, MA
PY  - 2002
TI  - Dielectric Properties of Multi-layer High-k Composite Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853840
ER  -