TY  - CONF
AU  - Lin, Eric
AU  - Satija, Sushil
AU  - Wu, Wen-Li
AU  - Soles, Christopher
AU  - Goldfarb, D
AU  - Trinque, B
AU  - Burns, S
AU  - Jones, Ronald
AU  - Lenhart, Joseph~undefined~undefined~undefined~undefined~undefined
AU  - Angelopoulos, M
AU  - Willson, C
C2  - Advances in Resist Processing and Technology, Conference | 19th | Advances in Resist Processing and Technology XIX | SPIE, CA, CA
DA  - 2002-12-01
LA  - en
M1  - 4690
PB  - Advances in Resist Processing and Technology, Conference | 19th | Advances in Resist Processing and Technology XIX | SPIE, CA, CA
PY  - 2002
TI  - Measurement of the Spatial Evolution of the Deprotection Reaction Front With Nanometer Resolution Using Neutron Reflectometry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852040
ER  -