TY  - CONF
AU  - Wu, Wen-Li
AU  - Lin, Eric
AU  - Jin, C
AU  - Wetzel, J
C2  - Materials, Technology, and Reliability for Advanced Interconnects and Low-K Dielectrics, Symposium  |  | Materials, Technology, and Reliability for Advanced Interconnects and Low-K Dielectrics | Materials Research Society,  San Francisco, CA
DA  - 2000-04-01
LA  - en
M1  - 612
PB  - Materials, Technology, and Reliability for Advanced Interconnects and Low-K Dielectrics, Symposium  |  | Materials, Technology, and Reliability for Advanced Interconnects and Low-K Dielectrics | Materials Research Society,  San Francisco, CA
PY  - 2000
TI  - A Three-Phase Model for the Structure of Porous Thin Films Determined by X-Ray Reflectivity and Small Angle Neutron Scattering
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851720
ER  -