TY - CONF AU - Silverstein, M AU - Bauer, Barry AU - Lee, V. AU - Hedden, R AU - Landes, B AU - Lyons, J AU - Kern, B AU - Niu, J AU - Kalantar, T C2 - ULSI Technology DA - 2003-01-01 LA - en M1 - 25(1) PB - ULSI Technology PY - 2003 TI - The Structural Evolution of Pore Formation in Low-K Dielectric Thin Films UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852139 ER -