TY  - CONF
AU  - Silverstein, M
AU  - Bauer, Barry
AU  - Lee, V.
AU  - Hedden, R
AU  - Landes, B
AU  - Lyons, J
AU  - Kern, B
AU  - Niu, J
AU  - Kalantar, T
C2  - ULSI Technology
DA  - 2003-01-01
LA  - en
M1  - 25(1)
PB  - ULSI Technology
PY  - 2003
TI  - The Structural Evolution of Pore Formation in Low-K Dielectric Thin Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852139
ER  -