TY  - JOUR
AU  - Hedden, R
AU  - Waldfried, C
AU  - Lee, H
AU  - Escorcia, O
C2  - Journal of the Electrochemical Society
DA  - 2004-01-01
LA  - en
M1  - 151(8)
PB  - Journal of the Electrochemical Society
PY  - 2004
TI  - Comparison of Curing Processes for Porous Dielectrics Measurements From Specular X-ray Reflectivity
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852140
ER  -