TY  - JOUR
AU  - Hedden, R
AU  - Lee, V.
AU  - Soles, Christopher
AU  - Bauer, Barry
C2  - Langmuir
DA  - 2004-01-01
LA  - en
M1  -  ASAP(on-line)
PB  - Langmuir
PY  - 2004
TI  - Characterization of Pore Structure in a Nanoporous Low-Dielectric Constant Thin Film by Neutron Scattering Porosimetry and X-ray Porosimetry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853934
ER  -