TY  - CONF
AU  - Germer, Thomas
AU  - Mulholland, George
AU  - Jae, 
AU  - Ehrman, S
C2  - Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components
DA  - 2002-11-01
LA  - en
M1  - 4779
PB  - Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components
PY  - 2002
TI  - Measurement of the 100 nm NIST SRM 1963 by Laser Surface Light Scattering
ER  -