TY  - CONF
AU  - Tarrio, Charles
AU  - Vest, Robert
AU  - Grantham, Steven
AU  - Liu, K
AU  - Lucatorto, Thomas
AU  - Shaw, Ping-Shine
C2  - International Conference on Synchrotron Radiation Instrumentation
DA  - 2004-11-01
LA  - en
M1  - 708
PB  - International Conference on Synchrotron Radiation Instrumentation
PY  - 2004
TI  - Improved Radiometry For Extreme-Ultraviolet Lithography
ER  -