TY  - JOUR
AU  - Tanenbaum, D
AU  - Laracuente, A
AU  - Gallagher, Alan
C2  - Physical Review B (Condensed Matter and Materials Physics)
DA  - 1997-08-01
LA  - en
M1  - 56
PB  - Physical Review B (Condensed Matter and Materials Physics)
PY  - 1997
TI  - Surface Roughening During Plasma-Enhanced Chemical-Vapor Deposition of Hydrogenated Amorphous Silicon on Crystal Silicon Substrates
ER  -