TY  - CONF
AU  - Germer, Thomas
C2  - Surface Scattering and Diffraction for Advanced Metrology, Conference | 2nd | Surface Scattering and Diffraction for Advanced Metrology II | SPIE
DA  - 2002-09-01
LA  - en
PB  - Surface Scattering and Diffraction for Advanced Metrology, Conference | 2nd | Surface Scattering and Diffraction for Advanced Metrology II | SPIE
PY  - 2002
TI  - Measurement of Lithographic Overlay by Light-Scattering Ellipsometry
ER  -