TY  - CONF
AU  - Tsai, Benjamin
AU  - Bodycomb, J
AU  - DeWitt, D
AU  - Kreider, Kenneth
AU  - Kimes, William
C2  - IEEE International Conference on Advanced Thermal Processing of Semiconductors |12th | | IEEE
DA  - 2004-09-01
LA  - en
PB  - IEEE International Conference on Advanced Thermal Processing of Semiconductors |12th | | IEEE
PY  - 2004
TI  - Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed
ER  -