TY  - CONF
AU  - Horvath, P
C2  - ICPIG | 16th |  | ICPIG, Greifswald, GE
DA  - 2003-07-01
LA  - en
PB  - ICPIG | 16th |  | ICPIG, Greifswald, GE
PY  - 2003
TI  - Polysilane Production in RF SiH<sub>4</sub> and H<sub>2</sub> - SiH<sub>4</sub> Plasmas
ER  -