TY  - JOUR
AU  - Schwabedissen, A
AU  - Benck, Eric
AU  - Roberts, J
C2  - Plasma Sources Science & Technology
DA  - 1998-01-01
LA  - en
M1  - 7
PB  - Plasma Sources Science & Technology
PY  - 1998
TI  - Comparison of Electron Density Measurements in Planar Inductively Coupled Plasmas by Means of the Plasma Oscillation Method and Lanqmuir Probes
ER  -