TY  - JOUR
AU  - Germer, Thomas
AU  - Scheer, B
C2  - SPIE series
DA  - 1998-07-01
LA  - en
M1  - 3246
PB  - SPIE series
PY  - 1998
TI  - Polarization of Out-of-Plane Optical Scatter From SiO<sub>2</sub> Films Grown on Photolithographically-Generated Microrough Silicon
ER  -