TY  - JOUR
AU  - Reader, Joseph
C2  - Metrologia
DA  - 2002-01-01
LA  - en
M1  - 39
PB  - Metrologia
PY  - 2002
TI  - Metrological Implications of Recent Interferometric Wavelength Measurements for Singly Ionized Silicon in the Vacuum Ultraviolet (152 nm and 180 nm)
ER  -