TY  - JOUR
AU  - Benck, Eric
AU  - Golubiatnikow, G
AU  - Fraser, Gerald
AU  - Ji, B
AU  - Motika, S
AU  - Karwacki, E
C2  - Journal of Vacuum Science and Technology B
DA  - 2003-09-01
LA  - en
M1  - 21
PB  - Journal of Vacuum Science and Technology B
PY  - 2003
TI  - Submillimeter-Wavelength Plasma Chemical Diagnostics for Semiconductor Manufacturing
ER  -