TY - JOUR AU - Levine, Zachary AU - Grantham, Steven AU - Paterson, D AU - McNulty, I AU - Noyan, I AU - Levin, T C2 - Journal of Applied Physics DA - 2004-01-01 LA - en M1 - 95 PB - Journal of Applied Physics PY - 2004 TI - Imaging Material Components of an Integrated Circuit Interconnect ER -