TY  - JOUR
AU  - Benck, Eric
AU  - Goyette, A
AU  - Wang, Yicheng
C2  - Journal of Applied Physics
DA  - 2003-08-01
LA  - en
M1  - 94
PB  - Journal of Applied Physics
PY  - 2003
TI  - Ion Energy Distribution and Optical Measurements in High-Density, Inductively Coupled C<sub>4</sub>F<sub>6</sub> Discharges
ER  -