TY  - JOUR
AU  - Mahan, A.
AU  - Xu, Y
AU  - Nelson, B
AU  - Crandall, R
AU  - Cohen, J
AU  - Palinginis, K
AU  - Gallagher, Alan
C2  - Applied Physics Letters
DA  - 2001-06-01
LA  - en
M1  - 78
PB  - Applied Physics Letters
PY  - 2001
TI  - Saturated Defect Densities of Hydrogenated Amorphous Silicon Grown by Hot-Wire Chemical Vapor Deposition at Rates up to 150 /S
ER  -