TY  - GEN
AU  - Tarrio, Charles
AU  - Grantham, S
AU  - Squires, M
AU  - Vest, Robert
AU  - Lucatorto, Thomas
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2003-07-01
LA  - en
M1  - 108 No. 4
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2003
TI  - Towards High Accuracy Reflectometry for Extreme-Ultraviolet Lithography
ER  -