TY  - CONF
AU  - Tarrio, Charles
AU  - Vest, Robert
AU  - Grantham, S
C2  - Harnessing Light: Optical Science and Metrology at NIST
DA  - 2001-08-01
LA  - en
M1  - 4450
PB  - Harnessing Light: Optical Science and Metrology at NIST
PY  - 2001
TI  - Absolute Extreme Ultraviolet Metrology
ER  -