TY  - JOUR
AU  - Childs, M
AU  - Gallagher, Alan
C2  - Journal of Applied Physics
DA  - 2000-02-01
LA  - en
M1  - 87
PB  - Journal of Applied Physics
PY  - 2000
TI  - Small Particle Growth in Silane Radio-Frequency Discharges
ER  -