TY  - CONF
AU  - Chi, P
AU  - Simons, David
AU  - McKinley, J
AU  - Stevie, F
AU  - Granger, C
C2  - Characterization and Metrology for ULSI Technology, International Conference | | Characterizatoin and Metrology for ULSI Technology 2000 | AIP
DA  - 2001-02-01
LA  - en
M1  - 550
PB  - Characterization and Metrology for ULSI Technology, International Conference | | Characterizatoin and Metrology for ULSI Technology 2000 | AIP
PY  - 2001
TI  - High Precision Measurements of Arsenic Implantation Dose in Silicon by Secondary Ion Mass Spectrometry
ER  -